000 00431nam a2200169Ia 4500
008 180424s9999 xx 000 0 und d
084 _a535.845 H1
100 _a"Hurrle, Karl"
245 0 _aTechnical Dictionary of Vacuum Physics and Vacuum Technology
250 _a\\197200ENGGPSX
260 _aPergamon
260 _b1972
260 _cOxford
300 _a202p
500 _aincludes index and biblioraphy
942 _cBK
999 _c37601
_d37601